IMAGING OPTICAL SYSTEM, EXPOSURE APPARATUS, METHOD OF ADJUSTING IMAGING OPTICAL SYSTEM, METHOD OF ADJUSTING EXPOSURE APPARATUS, AND METHOD OF MANUFACTURING DEVICE
摘要
<P>PROBLEM TO BE SOLVED: To provide an imaging optical system capable of reducing polarization aberration. <P>SOLUTION: The imaging optical system PL for forming an image of a pattern of a first plane R on a second plane W is configured so that the imaging optical system PL has a plurality of optical members LS1-LS7, and at least any one of the optical members LS1-LS7 can be substituted by a correction optical member for correcting the polarization aberration residing in the imaging optical system PL. <P>COPYRIGHT: (C)2007,JPO&INPIT
