OPTICAL ELEMENT DRIVING DEVICE, EXPOSURE DEVICE, AND DEVICE MANUFACTURING METHOD

摘要

PROBLEM TO BE SOLVED: To provide a thin optical element driving device having high reliability in which a bending moment is prevented from being applied to a linear actuator as a drive means, thereby preventing the breakage of the linear actuator; and to provide an exposure device having the optical element driving device and a device manufacturing method using the exposure device.

SOLUTION: A displacement extraction link is supported by one end of the linear actuator through a support mechanism and provided with a first link mechanism displaced in a direction perpendicular to the optical axis direction. Since the support mechanism is provided, the bending moment is prevented from being applied to the linear actuator to prevent the breakage of the linear actuator. Thus, reliability is high and a thin configuration is obtained.

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