发明名称 FIN-SHAPED 5 CHANNELS TRANSISTOR AND ITS MANUFACTURING METHOD
摘要 PROBLEM TO BE SOLVED: To provide a fin-shaped transistor whose channel area is more increased and even small fin-shaped structure can keep a sufficient fin effect and its manufacturing method. SOLUTION: The fin-shaped transistor has a fin active area (35A), a gate insulating film (36A) which is formed in a side surfaces (35X, 35Y) and upper surface (35Z) of the fin active area (35A), and a gate electrode (37A) which is formed on the gate insulating film (36A) so as to cover all the surfaces (35X, 35Y, 35Z) of the fin active area (35A). COPYRIGHT: (C)2007,JPO&INPIT
申请公布号 JP2007180486(A) 申请公布日期 2007.07.12
申请号 JP20060221172 申请日期 2006.08.14
申请人 HYNIX SEMICONDUCTOR INC 发明人 KIM KWANG-OK
分类号 H01L29/78 主分类号 H01L29/78
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