发明名称 MONOLITHIC MEMS-BASED WAVELENGTH-SELECTIVE SWITCHES AND CROSS CONNECTS
摘要 Wavelength-selective 1xN switches (WSSs) and NxN cross-connects (WSXCs) are described which are fabricated as monolithic or hybrid devices. In a preferred embodiment, the optic ports, dispersion elements, and collimating elements are formed on a single monolithic substrate. A micromirror and actuator are either fabricated within the substrate or a separate micromirror is utilized forming a hybrid WSS or WSXC. The optical elements can be formed in an opaque substrate layer (e.g., silicon, SOI, and so forth) or in an optically transparent layer of a PLC material (e.g., silica-on-silicon). Embodiments describe the use of linear and rotary comb drives for actuating front surface mirrors, or solid-immersion micromirrors (SIMs). The switching devices reduce system footprint while reducing or eliminating the need for alignment of the optical elements.
申请公布号 US2007160321(A1) 申请公布日期 2007.07.12
申请号 US20060566184 申请日期 2006.12.01
申请人 THE REGENTS OF THE UNIVERSITY OF CALIFORNIA 发明人 WU MING-CHIANG;CHI CHAO-HSI
分类号 G02B6/28;G02B6/34 主分类号 G02B6/28
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