发明名称 TAPERED PROBE STRUCTURES AND FABRICATION
摘要 <p>Probe structures and fabrication techniques are described. The described probe structures can be used as probes for various applications such as conductance measurement probes, field emitter probes, nanofabrication probes, and magnetic bit writing or reading probes.</p>
申请公布号 WO2007078316(A2) 申请公布日期 2007.07.12
申请号 WO2006US18151 申请日期 2006.05.10
申请人 THE REGENTS OF THE UNIVERSITY OF CALIFORNIA;JIN, SUNGHO 发明人 JIN, SUNGHO
分类号 G01Q70/16;H01L21/00;G01Q70/12 主分类号 G01Q70/16
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