发明名称 |
TAPERED PROBE STRUCTURES AND FABRICATION |
摘要 |
<p>Probe structures and fabrication techniques are described. The described probe structures can be used as probes for various applications such as conductance measurement probes, field emitter probes, nanofabrication probes, and magnetic bit writing or reading probes.</p> |
申请公布号 |
WO2007078316(A2) |
申请公布日期 |
2007.07.12 |
申请号 |
WO2006US18151 |
申请日期 |
2006.05.10 |
申请人 |
THE REGENTS OF THE UNIVERSITY OF CALIFORNIA;JIN, SUNGHO |
发明人 |
JIN, SUNGHO |
分类号 |
G01Q70/16;H01L21/00;G01Q70/12 |
主分类号 |
G01Q70/16 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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