| 摘要 |
Provided is a two-axis micro scanner in which horizontal driving required for high frequency motion uses a vertical comb-type electrode structure and vertical driving required for low frequency motion uses a piezo-actuator. The micro scanner includes: a frame; a horizontal driving unit including a micro mirror, a plurality of vertical moving comb-electrodes formed parallel to each other along opposite sides of the micro mirror, a plurality of vertical static comb-electrodes formed to alternate with the moving comb-electrodes; and a vertical driving unit including a plurality of cantilevers extending from the frame and respectively connecting opposite ends of the horizontal driving unit to support the horizontal driving unit, and a piezo-actuator installed on an upper surface of each of the cantilevers, wherein the cantilevers are upwardly/downwardly bent according to contraction/expansion of the piezo-actuators.
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