Curved slit valve door with flexible couplings

摘要

Embodiments of an apparatus for sealing a substrate transfer passage in a chamber are provided. In one embodiment, an apparatus for sealing a substrate transfer passage (316) in a chamber includes an elongated door member (402) having a concave sealing face coupled to an actuator by a flexible coupling (419). The flexible coupling (419) configured to allow movement of the door member (402) relative to the lever arm (413) in at least two planes.