发明名称 |
LINEAR MOTOR, STAGE APPARATUS AND EXPOSURE APPARATUS |
摘要 |
A linear motor with high heat recovery efficiency that inhibits the rise in surface temperature is offered. The linear motor is disposed in a surrounding member (142) and facing a flow passage (142a) of a liquid for regulating temperature, and is provided with a coil unit (141) having at least a part thereof in contact with the liquid. The coil unit (141) is provided with a coil body (144), a mold layer (143) that covers the coil body and holds it in specific form, and a liquid protection layer (150) that covers the mold layer (143) and has liquid protection properties. |
申请公布号 |
EP1806828(A1) |
申请公布日期 |
2007.07.11 |
申请号 |
EP20050787500 |
申请日期 |
2005.09.30 |
申请人 |
NIKON CORPORATION |
发明人 |
MORIMOTO, SHIGERU;KOMINAMI, TADAHIRO |
分类号 |
H02K41/02;G03F7/20;H01L21/027;H02K3/24;H02K3/30;H02K3/32;H02K9/19 |
主分类号 |
H02K41/02 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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