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发明名称
METHODS AND DEVICES FOR MEASURING A CONCENTRATED LIGHT BEAM
摘要
申请公布号
EP1805490(A1)
申请公布日期
2007.07.11
申请号
EP20050824935
申请日期
2005.10.28
申请人
APPLIED MATERIALS, INC.
发明人
THOMAS, TIMOTHY, N.;ADAMS, BRUCE;JENNINGS, DEAN, C.
分类号
G01J1/42
主分类号
G01J1/42
代理机构
代理人
主权项
地址
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