METHOD FOR FORMING FINE PATTERN,申请号EP20020775499-传众专利搜索

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发明名称	METHOD FOR FORMING FINE PATTERN
摘要
申请公布号	EP1452922(A4)	申请公布日期	2007.07.11
申请号	EP20020775499	申请日期	2002.11.05
申请人	TOKYO OHKA KOGYO CO., LTD.	发明人	SHINBORI, HIROSHI;SUGETA, YOSHIKI;KANEKO, FUMITAKE;TACHIKAWA, TOSHIKAZU
分类号	G03F7/00;G03F7/40;H01L21/027;(IPC1-7):G03F7/40	主分类号	G03F7/00
代理机构		代理人
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