发明名称 Mounting and dicing process for wafers
摘要 Embodiments of the invention provide methods for mounting and dicing a double bumped wafer. For one embodiment, the thickness of the adhesive layer of a dicing tape is greater than the height of the bumps to which it is applied, such that the adhesive layer conforms to the bumps and distributes the pressure of a mounting roller more evenly. For one embodiment, the dicing tape has an adhesive layer approximately twice the thickness of the wafer bump to which it is applied. For one embodiment, a radiation sensitive adhesive is used that has a pre-radiation adhesive strength of approximately 200 grams/25 mm<SUP>2 </SUP>and a post-radiation adhesive strength of approximately 2 grams/25 mm<SUP>2</SUP>. For one embodiment, a dual blade dicing process is employed that cuts into only a portion of the adhesive layer of the dicing tape in order to reduce adhesive blade loading.
申请公布号 US7241642(B2) 申请公布日期 2007.07.10
申请号 US20040769534 申请日期 2004.01.30
申请人 INTEL CORPORATION 发明人 HURTADO ALEJANDRO
分类号 H01L21/00;H01L21/44;H01L21/68;H01L21/78 主分类号 H01L21/00
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