发明名称 |
Piezoelectric and electrostatic microelectromechanical system actuator |
摘要 |
Provided is a microelectromechanical system (MEMS) actuator in which a cantilever piezoelectric actuator and a comb actuator are combined to perform dual shaft drive. The MEMS includes: a stationary comb fixed on a substrate; a movable comb disposed separately from the substrate; and a spring connected to the movable comb and the substrate to resiliently support the movable comb, wherein the movable comb includes a piezoelectric material layer in a laminated manner to be perpendicularly moved by a piezoelectric phenomenon and laterally moved by an electrostatic force to the stationary comb, whereby the MEMS actuator can be used in a driving apparatus of an ultra-slim optical disk drive since the movable comb is made of a piezoelectric material to simultaneously perform focusing actuation to a Z-axis as well as planar actuation.
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申请公布号 |
US7242129(B2) |
申请公布日期 |
2007.07.10 |
申请号 |
US20050157745 |
申请日期 |
2005.06.21 |
申请人 |
ELECTRONICS AND TELECOMMUNICATIONS RESEARCH INSTITUTE |
发明人 |
KIM KI CHUL;KIM SANG HYEOB;KIM HYE JIN;CHO DOO HEE |
分类号 |
H02N1/00 |
主分类号 |
H02N1/00 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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