发明名称 SEMICONDUCTOR DEVICE PATTERN FOR TEST
摘要 A semiconductor device pattern for a test is provided to monitor stably AC(Alternating Current) characteristics in a semiconductor device fabrication by counting the clock signals oscillated from a ring oscillator using a counter. A semiconductor device pattern for a test includes a plurality of ring oscillators and a counter. The ring oscillators(110) are used for generating a test clock signal. The counter(120) is used for receiving the test clock signal generated from the ring oscillator and counting the number of test clock signals. The semiconductor device pattern for the test is formed within a scribe region of a semiconductor wafer. The semiconductor device pattern for the test further includes a decoder for selecting one out of the plurality of ring oscillators.
申请公布号 KR20070073274(A) 申请公布日期 2007.07.10
申请号 KR20060000999 申请日期 2006.01.04
申请人 SAMSUNG ELECTRONICS CO., LTD. 发明人 HAN, YONG WOON;LEE, KI AM
分类号 H01L21/66 主分类号 H01L21/66
代理机构 代理人
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