| 摘要 |
<p>An apparatus for detecting particles on a reticle surface and a particle detecting method using the same are provided to perform a particle inspecting process on a reticle by removing the particles from the reticle surface before the particle inspecting process using a gas spray unit capable of spraying a high pressure gas onto the reticle surface. An apparatus for detecting particles on a reticle surface includes a housing(100) with an opening for loading/unloading a reticle, a particle detector, a gas spray unit. The particle detector is installed in the housing in order to inspect the particles attached to the reticle surface. The gas spray unit(300) is used for removing the particles from the reticle surface by spraying a high pressure gas onto to the reticle.</p> |
