发明名称 |
WET SCRUBBER SYSTEM COMPRISING DILUTION APPARATUS OF PH ADJUSTER |
摘要 |
A wet scrubber system comprising a dilution apparatus of a pH adjuster is provided to purify effectively exhaust gas by adjusting easily a flow rate of the pH adjuster and maintaining constantly pH of a process. A process water supply unit(10) supplies process water. Cations of the process water are removed by using a cation exchange resin. A pH adjuster storage unit(20) stores the pH adjuster of first density. A pH adjuster dilution unit(30) provides the pH adjuster of second density by diluting the pH adjuster of the first density. A pH measurement unit(40) measures pH of purification water as a mixture of the pH adjuster of the second density and the process water. A pH control valve(50) is controlled according to pH measured by the pH measurement unit.
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申请公布号 |
KR20070073010(A) |
申请公布日期 |
2007.07.10 |
申请号 |
KR20060000465 |
申请日期 |
2006.01.03 |
申请人 |
SAMSUNG ELECTRONICS CO., LTD. |
发明人 |
LEE, HAE SUNG |
分类号 |
H01L21/304 |
主分类号 |
H01L21/304 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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