发明名称 WET SCRUBBER SYSTEM COMPRISING DILUTION APPARATUS OF PH ADJUSTER
摘要 A wet scrubber system comprising a dilution apparatus of a pH adjuster is provided to purify effectively exhaust gas by adjusting easily a flow rate of the pH adjuster and maintaining constantly pH of a process. A process water supply unit(10) supplies process water. Cations of the process water are removed by using a cation exchange resin. A pH adjuster storage unit(20) stores the pH adjuster of first density. A pH adjuster dilution unit(30) provides the pH adjuster of second density by diluting the pH adjuster of the first density. A pH measurement unit(40) measures pH of purification water as a mixture of the pH adjuster of the second density and the process water. A pH control valve(50) is controlled according to pH measured by the pH measurement unit.
申请公布号 KR20070073010(A) 申请公布日期 2007.07.10
申请号 KR20060000465 申请日期 2006.01.03
申请人 SAMSUNG ELECTRONICS CO., LTD. 发明人 LEE, HAE SUNG
分类号 H01L21/304 主分类号 H01L21/304
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