摘要 |
A test-gas leak detector ( 1 ) includes a connection ( 27 ) for a device under test, a sniffer, or a leak detector chamber, a high-vacuum pump ( 2 ), a test-gas detector ( 5 ) that is connected on the intake side of said pumps, and a test-gas conduit ( 28 ) leading from the connection of the leak detector ( 27 ). The conduit is connected to at least one intermediate stage of the high-vacuum pump ( 2 ) in addition to the pre-vacuum zone of the high-vacuum pump ( 2 ) via conduit sections ( 31, 32, 35 ) and valves ( 33, 34, 36 ). A housing ( 9 ), in which at least some of the conduits and valves and the high-vacuum pump ( 2 ) are integrated, forms part of the leak detector ( 1 ) and a detachable slide-in module ( 51 ) forms part of the high-vacuum pump. The slide-in module has an external jacket construction ( 53 ) comprising passages ( 58, 61 ) and when the leak detector ( 1 ) is operational, is situated in a receiving opening ( 52 ) that is provided in the housing ( 9 ).
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