SCAN CONTROL SYSTEM OF IMPLANTER

摘要

A scan control system of an implanter is provided to prevent loss of a wafer and a failure of an expensive part by suppressing collision between a handler robot and a scanner. A process module controller(10) outputs a motor driving control signal to move a wafer to a scan loading position and outputs a scan home signal according to a predetermined encoding signal corresponding to the motor driving control signal. An encoder(16) outputs an encoding pulse. A servo control unit(12) drives a scan motor according to the motor driving signal of the process module controller and provides an encoding pulse to the process module controller. A scan position control unit(20) is connected to the scan motor in order to fix vertically the wafer and to transfer the wafer to the scan loading position by using the scan motor. A sensing bar(24) is installed at the scan position control unit. A scan home sensor(26) is fixed to an air bearing in order to sense a normal state of the scan loading position according to a loading state of the sensing bar. An X scan unit(28) performs an X scan return operation according to a driving state of the scan home sensor.