| 摘要 |
A carbon nanotube synthesizing apparatus which can uniformly distribute a source gas into the entire reaction tube, can increase the utilization efficiency of the source gas, and can improve productivity is provided. In an apparatus(100) for synthesizing carbon nanotubes on synthetic substrates(10), the apparatus for synthesizing carbon nanotubes comprises: a reaction tube(120) that provides a production space of the carbon nanotubes; a heating part(140) that heats the reaction tube; a boat(160) which is formed in the production space of the reaction tube, and on which the synthetic substrates are put; and a gas feeding part(150) including a nozzle unit(154) for feeding a source gas into the production space of the reaction tube, wherein the nozzle unit includes ejection parts for feeding the source gas into the production space from different elevations. The nozzle unit has a first ejection part including long nozzles(156a), and a second ejection part including medium nozzles(158a). The apparatus further comprises a gas exhaust part(180) and a residual gas detection part(170). The gas feeding part additionally includes a source gas supply source(151), an inert gas supply source(152), and a feeding line(153). |
