SUBSTRATE TRANSFER APPARATUS AND SYSTEM PRODUCTING CARBON NANO TUBE WITH IT

摘要

A substrate transfer apparatus and a carbon nano tube generating system with the same are provided to prevent the damage of a substrate due to an abrupt variation of temperature of the substrate by minimizing a contact area between the substrate and a blade using a plurality of protrusions formed on an upper surface of the blade. A substrate transfer apparatus(300) includes a blade, an arm and a driving unit. The blade(340) is used for loading a substrate. The arm(320) is used for transferring the blade. The driving unit(365) is used for driving the arm. A plurality of protrusions are formed on an upper surface of the blade, so that the contact area between the substrate and blade is minimized.