| 摘要 |
A vacuum gate valve is provided to interrupt contact of discharged gas against an actuator by installing a contractible bellows tube, thereby preventing byproducts from adhered on the actuator. One end of a hollow cylinder(40) is sealed and secured to an outlet portion(13) of a valve casing(10), and the other end of the hollow cylinder is sealed and secured to a flange(50). On end of a bellows tube(60) is coupled to the flange and inserted into the cylinder, and the bellow tube has an outer diameter smaller than an inner diameter of the cylinder. A hollow piston cylinder(70) has one end coupled to the other end of the bellows tube and the other end selectively positioned according to expansion or contraction of the bellows tube.
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