| 摘要 |
A displacement gauge comprises an objective lens 15 that projects light onto a measurement subject 16 , an exciting portion that vibrates the objective lens 15 at a preset amplitude along an optical axis direction of light passing through the objective lens 15 , a position detector for detecting the position of the objective lens 15 , an objective lens scan portion 52 for scanning the objective lens 15 along a plane orthogonal to the optical axis direction, an objective lens movement detecting portion 53 for detecting the moved position of the objective lens 15 , an operation processing portion 58 for calculating a distribution of displacement amount within a measuring area, based on the positional information of the objective lens 15 within the measuring area detected by the objective lens movement detecting portion 53 , and the displacement amounts measured at plural measuring points, and an output portion 66 for outputting the result of calculation by the operation processing portion 58.
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