| 摘要 |
A CVD apparatus for a flat display is provided to reduce a standby time for maintenance work of the apparatus by forcibly cooling a susceptor in a short time, thereby preventing the whole progress loss. A deposition process for a flat display(G) is carried out in a chamber(10), and a susceptor(30) is movably installed in the chamber, in which the flat display is loaded on an upper surface of the susceptor. At least one cooling block is provided on a bottom surface of the chamber, and comes in contact with the susceptor when the susceptor moves is mowed down, thereby cooling the susceptor heated at the deposition process.
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