| 摘要 |
A substrate transfer apparatus is provided to reduce a substrate holding time and to improve transfer efficiency of the substrate by performing continuously the up/down motion of a buffer hand using two support frames with a driving unit. A substrate transfer apparatus includes a substrate transfer unit, a buffer hand, two support frames, and a position transforming unit. The substrate transfer unit includes a plurality of transfer rollers spaced apart from each other to transfer a substrate. The buffer hand(2) is used for supplying/receiving the substrate to/from the transfer rollers through up/down motions. The two support frames(4) include a driving unit capable of performing the up/down motions of the buffer hand. The buffer hand is hinge-connected with the support frames through the position transforming unit(8), so that the buffer hand is capable of being rotated by using the hinge portion as a reference.
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