CHEMICAL VAPOR DEPOSITION APPARATUS FOR FLAT DISPLAY

摘要

A CVD apparatus for a flat display is provided to stably support a gas distribution plate in a suspending state against an electrode, without forming a spaced space therebetween. An electrode(16) is provided in a chamber in which a deposition process for a flat display is carried out. An electrode support(25) is provided on one side of the electrode to support the electrode. A gas distribution plate(17) is disposed under the electrode to distribute a deposition material on the flat display. A corrugated suspending support member(50) is connected to a surrounding portion of the gas distribution plate to support the gas distribution plate against the electrode.