Non-corrosive cleaning composition for removing plasma etching residues,申请号KR20027006222-传众专利搜索

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发明名称	Non-corrosive cleaning composition for removing plasma etching residues
摘要
申请公布号	KR100736061(B1)	申请公布日期	2007.07.06
申请号	KR20027006222	申请日期	2002.05.15
申请人		发明人
分类号	D01F6/62;C11D7/32	主分类号	D01F6/62
代理机构		代理人
主权项
地址

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