发明名称 CARBON NANOTUBE TRANSISTOR ARRAY AND METHOD OF MANUFACTURING SAME
摘要 PROBLEM TO BE SOLVED: To easily manufacture an array of a plurality of carbon nanotube transistors which are controlled to show identical characteristics or voltage resistance characteristic in regard to the carbon nanotube transistor array, and to provide a method of manufacturing the same. SOLUTION: A 3-terminal electrode 4 is provided respectively for a plurality of carbon nanotube elements 3 dividing the carbon nanotube 2 derived from a common single long-length semiconductor. COPYRIGHT: (C)2007,JPO&INPIT
申请公布号 JP2007173428(A) 申请公布日期 2007.07.05
申请号 JP20050367516 申请日期 2005.12.21
申请人 FUJITSU LTD 发明人 YAMAGUCHI YOSHITAKA;IWAI DAISUKE;KONDO DAIYU
分类号 H01L29/786;H01L21/822;H01L27/04;H01L29/06 主分类号 H01L29/786
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