| 摘要 |
<p><P>PROBLEM TO BE SOLVED: To provide a laser beam machining apparatus which can prevent the generation of faults in a machining shape caused by the abnormality of the beam mode of the laser beam to irradiate a workpiece. <P>SOLUTION: The laser beam radiated from a laser oscillator 1 is reflected by means of a galvanomirror 4. Then, the reflected laser beam is converged on the surface of the workpiece 7 by means of an fθlens 5, which is a converging optical component, and also a beam profiler 6 is arranged in the optical path of the laser beam reflected by the galvanomirror 4 so as to be mounted and dismounted. <P>COPYRIGHT: (C)2007,JPO&INPIT</p> |
