| 摘要 |
<p>In the growing of carbon nanotubes, a substrate is delivered into a thermal CVD chamber whose internal temperature is room temperature, and a mixed gas consisting of an inert gas and a raw gas is introduced in the interior thereof. The pressure within the chamber is stabilized at 1 kPa, and thereafter the temperature within the chamber is raised to 510°C over a period of 1 min. As a result, without fusion bonding of catalyst particles, linear growth of carbon nanotube is initiated from each of the catalyst particles. Subsequently, the temperature and the atmosphere are maintained for about 30 min. Once the growth of carbon nanotubes starts, because the surfaces of the catalyst particles are covered by carbon, any fusion bonding of catalyst particles can be avoided even during the maintenance for about 30 min.</p> |
