| 发明名称 |
ETCHANT FORMULATIONS AND USES THEREOF |
| 摘要 |
<p>The invention relates to an etchant formulation comprises an inorganic acid and an organic acid. The organic acid comprises an aliphatic or aromatic organic compound having a carboxylic acid group or the salt thereof. The invention also relates to a method of etching using the etchant formulation.</p> |
| 申请公布号 |
WO2007075875(A2) |
申请公布日期 |
2007.07.05 |
| 申请号 |
WO2006US48768 |
申请日期 |
2006.12.22 |
| 申请人 |
3M INNOVATIVE PROPERTIES COMPANY;DEVASENAPATHI, APPUSWAMY |
发明人 |
DEVASENAPATHI, APPUSWAMY |
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