发明名称 |
FILM FORMING APPARATUS AND PROCESS FOR PRODUCING LIGHT EMITTING ELEMENT |
摘要 |
<p>A film forming apparatus characterized by including a treating vessel having, provided thereinside, a holding table for holding of a treatment object substrate, two targets opposite to each other and gas supply means for feeding of a treating gas to be plasma excited into the treating vessel so that by applying of voltage to the two targets and plasma exciting of the treating gas, a conductive layer is formed on an organic layer superimposed on the treatment object substrate.</p> |
申请公布号 |
WO2007074563(A1) |
申请公布日期 |
2007.07.05 |
申请号 |
WO2006JP318863 |
申请日期 |
2006.09.22 |
申请人 |
TOKYO ELECTRON LIMITED;MOYAMA, KAZUKI;NOZAWA, TOSHIHISA |
发明人 |
MOYAMA, KAZUKI;NOZAWA, TOSHIHISA |
分类号 |
C23C14/34;H01L51/50;H05B33/10 |
主分类号 |
C23C14/34 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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