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发明名称
Verfahren zur Konditionierung der Oberfläche eines Polierkissens
摘要
申请公布号
DE60121292(T2)
申请公布日期
2007.07.05
申请号
DE20016021292T
申请日期
2001.04.02
申请人
INFINEON TECHNOLOGIES AG
发明人
GLASHAUSER, WALTER;UTESS, BENNO;PURATH, ANDREAS DR.
分类号
B24B49/16;B24B37/04;B24B53/00;B24B53/007;H01L21/304
主分类号
B24B49/16
代理机构
代理人
主权项
地址
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