| 摘要 |
<p><P>PROBLEM TO BE SOLVED: To provide a charged particle beam device technology which stably emits charged particle beam from a high intensity charged particle beam source such as CNT (carbon nanotube), and is stable for a long period of time with high resolution. <P>SOLUTION: A surface cleaning means is provided. Thereby, for example. an amorphous contaminated film attached on a surface of the CNT is eliminated. Therefore, reaction gas introducing means 5, 6, and a gas activation means 30 are provided as the surface cleaning means to constitute a cleaner for putting an electron source 1 of such as the CNT to treat the electron source 1 before use. Alternatively, the reaction gas introducing means and the gas activation means are incorporated in an electron gun device to clean the surface in the device. <P>COPYRIGHT: (C)2007,JPO&INPIT</p> |
