| 摘要 |
PROBLEM TO BE SOLVED: To scan a linearly polarized light on the surface of an object to be measured existing in a light scanning area, even when the surface of the object to be measured is covered with a liquid, appropriately via the liquid. SOLUTION: The light scanning device 2 comprises a light-emitting section 3 for emitting light and a light-emitting mirror 5 which reflects the light emitted from the light-emitting section 3, while being rotated to scan the light in a predetermined area in an ambient space. The light-emitting section 3 emits a linearly polarized light. A quarter-wave plate 12, which converts the polarization state of the linearly polarized light into a circularly polarized light, is placed on an optical path from the light-emitting section 3 to the light-emitting mirror 5. A quarter-wave plate 13, which converts the polarization state of the circularly polarized light into a linearly polarized light, is placed on the optical path of the light, emitted from the light-emitting section 3 and reflected by the light-projecting mirror 5. COPYRIGHT: (C)2007,JPO&INPIT
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