| 摘要 |
An apparatus for the analysis of a process having parameter-based faults includes: a parameter value inputter configured for inputting values of at least one process parameter, a fault detector, configured for detecting the occurrence of a fault, a learning file creator associated with the parameter value inputter and the fault detector, configured for separating the input values into a first learning file and a second learning file, the first learning file comprising input values from a collection period preceding each of the detected faults, and the second learning file comprising input values input outside the collection periods, and a learning file analyzer associated with the learning file creator, configured for performing a separate statistical analysis of the first and second learning files, thereby to asses a process status.
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