发明名称 COMBINATION OF A SUBSTRATE AND A WAFER
摘要 The invention pertains to a combination of a substrate ( 6 ) and a wafer ( 15 ), wherein the substrate ( 6 ) and the wafer ( 15 ) are arranged parallel to one another and bonded together with the aid of an adhesive layer ( 8 ) situated between the substrate ( 6 ) and the wafer ( 15 ), and wherein the adhesive is chosen such that its adhesive properties are neutralized or at least diminished when a predetermined temperature is exceeded. According to the invention, the adhesive layer ( 8 ) is only applied annularly between the substrate ( 6 ) and the wafer ( 15 ) in the edge region of the wafer ( 15 ).
申请公布号 US2007155129(A1) 申请公布日期 2007.07.05
申请号 US20060610750 申请日期 2006.12.14
申请人 THALLNER ERICH 发明人 THALLNER ERICH
分类号 H01L21/30 主分类号 H01L21/30
代理机构 代理人
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