| 摘要 |
PROBLEM TO BE SOLVED: To suppress the reverse flow of particles from a turbo-molecular pump into a vacuum treatment chamber. SOLUTION: This turbo-molecular pump comprises a structure for rebounding and changing the moving direction of the particles flying from the vacuum treating chamber and moving them to an exhaust side. The rebounding of the particles from a suction port to the upstream side is reduced to suppress the reverse flow of the particles from the turbo-molecular pump into the vacuum treating chamber. The turbo-molecular pump further comprises a structure for avoiding the collision of the particles with a rotor by collecting the particles flying from the vacuum treating chamber to the center of a rotor. Consequently, the reverse flow of the particles from the turbo-molecular pump into the vacuum treating chamber can be suppressed. COPYRIGHT: (C)2007,JPO&INPIT
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