| 摘要 |
PROBLEM TO BE SOLVED: To provide a static eliminator blowing air, which is lowered in contents of chemical substances such as acidic gas, alkaline gas, and organic gas contained in trace amounts to be used in a clean room/booth, toward a discharge electrode generating ions and feeding the generated ion wind to an object as a target of static elimination. SOLUTION: This static eliminator has a blower feeding air to the object as a target of the static elimination, and a chemical filter removing the chemical substances included in air taken in by the blower and the discharge electrode generating ions neutralizing charges carried in a static eliminated part are provided in an air passage of the blower. The discharge electrode is arranged in the leeward of at least one chemical filter. An impression voltage V to the discharge electrode ranges from 1500 volt to 3000 volt. COPYRIGHT: (C)2007,JPO&INPIT
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