ELECTROMAGNETIC ACTUATOR, METHOD OF MANUFACTURING PART OF ELECTROMAGNETIC ACTUATOR, AND LITHOGRAPHY APPARATUS EQUIPPED WITH ELECTROMAGNETIC ACTUATOR

摘要

PROBLEM TO BE SOLVED: To provide an electromagnetic actuator of high performance having a cooling structure for reducing a temperature change in a permanent magnet structure of the actuator. SOLUTION: The lithography apparatus has a patterning supporter constituted so as to support a patterning device and a substrate supporter constituted so as to support a substrate. At least one of the patterning supporter and the substrate supporter is moved by the electromagnetic actuator. The actuator has a first part and a second part relatively movable to each other. The first part has a coil structure, and the second part includes a plurality of permanent magnets acting each other with the coil structure. The second part is provided with a cooling structure arranged adjoining to the permanent magnet. A cooling duct is arranged between the adjacent permanent magnets or on one surface of the permanent magnet facing the coil structure. COPYRIGHT: (C)2007,JPO&INPIT