| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide a method of manufacturing a piezoelectric element capable of improving the characteristics of a piezoelectric layer and equalizing the characteristics of the piezoelectric layer, and a method of manufacturing a liquid jetting head. <P>SOLUTION: The method of manufacturing the piezoelectric element is provided with a process of forming a lower electrode 60 on a substrate 110; a process of forming a seed titanium layer 64 having a thickness of 3.5-5.5 nm on the lower electrode 60; a process of forming a piezoelectric precursor film 71 made of a piezoelectric material on the seed titanium layer 64, forming a piezoelectric layer 70 made of a piezoelectric film 72 formed by baking the piezoelectric precursor film 71 at a temperature increase rate of 50°C/sec or more and crystallizing it; and a process of forming an upper electrode on the piezoelectric layer 70. <P>COPYRIGHT: (C)2007,JPO&INPIT |
