发明名称 |
MICRO-FABRICATED DEVICE WITH THERMOELECTRIC DEVICE AND METHOD OF MAKING |
摘要 |
A micro-fabricated device, includes a support structure having an aperture formed therein, and a device substrate disposed within the aperture. The micro-fabricated device further includes a thermally isolating structure thermally coupling the device substrate to the support structure. The thermally isolating structure includes at least one n-doped region and at least one p-doped region formed on or in the thermally isolating structure and separated from each other. In addition, the thermally isolating structure includes an electrical interconnect connecting at least one n-doped region and at least one p-doped region, forming an integrated thermoelectric device.
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申请公布号 |
US2007152352(A1) |
申请公布日期 |
2007.07.05 |
申请号 |
US20070685518 |
申请日期 |
2007.03.13 |
申请人 |
MCKINNELL JAMES C;LIEBESKIND JOHN;CHEN CHIEN-HUA |
发明人 |
MCKINNELL JAMES C.;LIEBESKIND JOHN;CHEN CHIEN-HUA |
分类号 |
H01L23/34;H01L35/32;G11B9/10;H01L23/38;H01L35/14;H01L35/34 |
主分类号 |
H01L23/34 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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