| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide an electronic component moving device in which an electronic component can highly precisely be positioned and whose speed for operating a ball-screw driving device is high. <P>SOLUTION: The device is provided with first and second driving devices 14 and 17 having first and second motors 25 and 41, first and second ball-screw shafts 28 and 44, and first and second ball nuts 29 and 45. The device is also provided with a first moving member 13 moving in a horizontal direction by driving by the driving devices, and with a head unit 16. The head unit 16 is provided with a suction head 18. The device is provided with first and second ball nut motors 30 and 46 having rotors 31 and stators 34. The device is also provided with a controller 8 controlling operations of the motors 25, 30, 41 and 46. The controller 8 rotates the motors 25 and 41 for ball screw shaft driving, or the motors 30 and 46 for ball nut at the time of transferring the electronic component. <P>COPYRIGHT: (C)2007,JPO&INPIT |
