| 摘要 |
PROBLEM TO BE SOLVED: To provide a handler for grasping a substrate which solves such a problem generated conventionally that, when the substrate having a stuck RF-ID tag is used in the manufacturing process for substrates, the substrate has been stored in an erroneous case due to erroneous memory. SOLUTION: The handler for grasping a substrate comprises a fixed arm 11A, a pair of movable arms 11B provided respectively in first hinge portions 14, a pair of fastening portions 12 provided respectively on the inner-side surfaces of the pair of movable arms, an L-shaped lever 13 provided in a second hinge 17, a spring mounted on the lever 13, a handle 16 for holding the fixed arm 11A, and each mechanism for rotating each movable arm 11B. Further, each reading means 20 comprising an antenna portion 21, a controlling-board portion 22, and a displaying portion 23 is provided in each movable arm 11B. COPYRIGHT: (C)2007,JPO&INPIT |
