| 摘要 |
PROBLEM TO BE SOLVED: To secure a movable range of a movable part which is a counter mass; to compensate an inertia force always excellently; and to suppress vibration of a support and vibration of a sample or a probe. SOLUTION: A driving stage for deriving the sample or the probe has a counter driving element 500 for moving the probe 1 or a sample holding stand 505, and the movable parts 515, 510 moving in the compensating direction of the inertia force generated when the probe or the sample holding stand is moved. A scanning probe device has a characteristic wherein the movable parts 515, 510 are provided outside the counter driving element 500 so as to enclose the driving element. COPYRIGHT: (C)2007,JPO&INPIT |
