Micromechanical component with cap has substrate, micromechanical functional coating, cavity and cap bounding cavity; cap has conductive coating

摘要

The micromechanical component has a substrate (1), a micromechanical functional coating (2), a cavity and a cap bounding the cavity. The cap has a conductive coating. The cap is a thin coating cap. The cap consists of at least two layers. The conductive coating is not arranged on an outer side of the cap.