Micro-mechanical component used in the semiconductor industry comprises a cap having a membrane for closing an access opening

摘要

Micro-mechanical component comprises a cap having a membrane for closing an access opening (160). Independent claims are also included for the following: (1) Method for producing a micro-mechanical component; and (2) Method for closing a micro-mechanical component. Preferred Features: The cap is a thin layer cap with the membrane arranged under or over the cap. The membrane is arranged in a layer within the cap. The access opening is closed by a filler.