| 摘要 |
<P>PROBLEM TO BE SOLVED: To improve inspection accuracy using color information by acquiring an image where a bright spot of an illumination light source is not reflected on a component surface having a curved surface and analyzing this image. <P>SOLUTION: This substrate visual inspection apparatus comprises the illumination light source 21 for illuminating a visually inspected object, and an imaging means (camera 18) for imaging the visually inspected object illuminated by the illumination light source 21. The substrate visual inspection apparatus includes an image holding means for holding a plurality of images obtained by imaging the visually inspected object with the camera 18 while changing the illumination condition by the illumination light source 21, and an image processing means for generating an image where the reflection of the illumination light source 21 is removed by calculating the plurality of images held by the image holding means. Even when the visually inspected object is a component having a curved surface, an image where the illumination light source 21 is not reflected can be obtained. <P>COPYRIGHT: (C)2007,JPO&INPIT |
