| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide a plasma treatment device with an RF entrance window which does not crack easily or does not scatter even if it cracks. <P>SOLUTION: This plasma treatment device puts radio waves from an antenna in a container via a circular insulated window 3, and changes gas in the container into plasma. This device uses a heat resistance tape 21 wound on the periphery of the window 3 multiple times as a means for preventing the window 3 from being deformed. <P>COPYRIGHT: (C)2007,JPO&INPIT |
