| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide a wide band anti-reflection film which reduces variation of transmissivity characteristic of the anti-reflection film when optical elements are mass-produced while attaining broadband adaptation of the anti-reflection film. <P>SOLUTION: The wide band anti-reflection film 6 is constituted by laminating seven layers of thin films on a substrate 7. In regard to thin film constituting materials, a first thin film 8 is film-formed of MgF<SB>2</SB>which is known to have strong adhesiveness to the substrate 7. Further in the wide band anti-reflection film 6, a second thin film 9 is film-formed of H<SB>4</SB>(a mixture composed of La and TiO<SB>2</SB>), a third thin film 10 is film-formed of MgF<SB>2</SB>, a fourth thin film 11 is film-formed of H<SB>4</SB>, a fifth thin film 12 is film-formed of MgF<SB>2</SB>, a sixth thin film 13 is film-formed of H<SB>4</SB>and a seventh thin film 14 is film-formed of MgF<SB>2</SB>in order from a surface of the first thin film 8. <P>COPYRIGHT: (C)2007,JPO&INPIT |
