发明名称 |
Method of manufacture for a component including at least one single-crystal layer on a substrate |
摘要 |
The invention refers to a method of manufacture for a component including a single-crystal substrate on which is deposed at least one single-crystal layer, the method including one or several steps for single-crystal layers' deposit by pulverisation of a metal or of semi-conductors inside a plasma of gas, and the method being characterised in that the rate of atom deposit is lower than the homogenisation rate of such atoms among themselves.
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申请公布号 |
US2007155132(A1) |
申请公布日期 |
2007.07.05 |
申请号 |
US20060633707 |
申请日期 |
2006.12.05 |
申请人 |
ANCILOTTI MICHEL;TAUZINAT PIERRE;LAINAT FREDERIC;BRIERE OLIVIER;CARRIOT OLIVIER;GADOT GERARD |
发明人 |
ANCILOTTI MICHEL;TAUZINAT PIERRE;LAINAT FREDERIC;BRIERE OLIVIER;CARRIOT OLIVIER;GADOT GERARD |
分类号 |
H01L21/30;H01L21/20 |
主分类号 |
H01L21/30 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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