发明名称 Method of manufacture for a component including at least one single-crystal layer on a substrate
摘要 The invention refers to a method of manufacture for a component including a single-crystal substrate on which is deposed at least one single-crystal layer, the method including one or several steps for single-crystal layers' deposit by pulverisation of a metal or of semi-conductors inside a plasma of gas, and the method being characterised in that the rate of atom deposit is lower than the homogenisation rate of such atoms among themselves.
申请公布号 US2007155132(A1) 申请公布日期 2007.07.05
申请号 US20060633707 申请日期 2006.12.05
申请人 ANCILOTTI MICHEL;TAUZINAT PIERRE;LAINAT FREDERIC;BRIERE OLIVIER;CARRIOT OLIVIER;GADOT GERARD 发明人 ANCILOTTI MICHEL;TAUZINAT PIERRE;LAINAT FREDERIC;BRIERE OLIVIER;CARRIOT OLIVIER;GADOT GERARD
分类号 H01L21/30;H01L21/20 主分类号 H01L21/30
代理机构 代理人
主权项
地址