发明名称 Optical measuring device for measuring a cavity
摘要 An optical measuring device for measuring an inner wall of a cavity has a confocal proximity sensor. The beam path of the illumination light and the measuring light is deflected by a rotatably mounted reflector. By introducing an object-side end of the measuring device into the cavity a peripheral side wall of the cavity is measured. The reflector is rotated about an axis of rotation which coincides with the longitudinal axis of the optical measuring device. The inner wall is scanned along a line that revolves around the axis of rotation. The optical measuring device is equipped with two confocal proximity sensors. At the object-side end of the measuring device dual optics with a plurality of optical components are provided, by which the illumination beams of the two confocal proximity sensors are focused diametrically outwards at mutually opposing scanning points on the inner wall of the cavity.
申请公布号 US2007153296(A1) 申请公布日期 2007.07.05
申请号 US20060637328 申请日期 2006.12.12
申请人 SIEMENS AKTIENGESELLSCHAFT 发明人 SCHICK ANTON
分类号 G01B11/24 主分类号 G01B11/24
代理机构 代理人
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